E52-THE6D-150/300C E52-THE6D-50/150C E52-THE6D-50/50C E52-THE6F 0-100 2M E52-THE6F-0/100C E52-THE6F-100/200C E52-THE6F-150/300C E52-THE6F-50/150C E52-THE6F-50/50C E52-THE-E5L 0-100 0.5M