EFM32G200F16G-E-QFN32 EFM32G200F16G-E-QFN32R EFM32G200F16-QFN32 EFM32G200F16-QFN32T EFM32G200F32 EFM32G200F32G-E-QFN32 EFM32G200F32G-E-QFN32R EFM32G200F32-QFN32 EFM32G200F32-QFN32T EFM32G200F64