FX5-32ET/DSS FX5-32ET/ESS FX534 FX5-40P-SH FX5-40P-SH(71) FX5-40P-SH(98) FX5-40P-SH3 FX5-40P-SH3(71) FX5-40S2A-DSA FX5-40S2A-DSA (12)