SM6T220CA TVS SM6T220CA-E3/52 SM6T220CA-E3/5B SM6T220CA-E352 SM6T220CAHE3/52 SM6T220CAHE3/5B SM6T220CAHE3_A/H SM6T220CAHE3_A/I SM6T220CAHE3_B/H SM6T220CAHE3_B/I